Lara Lobo, Beatriz Fernandez, Rosario Pereiro, Nerea Bordel, Evgeny Demenev, Damiano Giubertoni,
Massimo Bersani, Philipp Hoenicke, Burkhard Beckhoff, A. Sanz-Medel, Quantitative depth profiling of boron and arsenic ultra low energy implants by pulsed rf-GD-ToFMS,
in «JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY»,
vol. 26,
, pp. 542-
549
Calibration correction of ultra low energy SIMS profiles based on MEIS analyses for arsenic shallow implants in silicon,
in «NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS»,
vol. xxx,
Development of nano-roughness under SIMS ion sputtering of Germanium surfaces,
SIMS XVIII,
Riva del Garda, Italia,
18-23/09/2011